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Nondestructive characterization of thin silicides using x-ray reflectivity
Publication:
Nondestructive characterization of thin silicides using x-ray reflectivity
Date
2000
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Detavernier, C.
;
De Gryse, R.
;
Van Meirhaeghe, R. L.
;
Cardon, F.
;
Ru, Guo-Ping
;
Qu, Xin-Ping
;
Li, Bing-Zong
;
Alves Donaton, Ricardo
;
Maex, Karen
Journal
J. Vacuum Science and Technology A
Abstract
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1945
since deposited on 2021-10-14
Acq. date: 2025-10-22
Citations
Metrics
Views
1945
since deposited on 2021-10-14
Acq. date: 2025-10-22
Citations