dc.contributor.author | Zidan, Mohamed | |
dc.contributor.author | Fischer, Daniel | |
dc.contributor.author | Severi, Joren | |
dc.contributor.author | De Simone, Danilo | |
dc.contributor.author | Moussa, Alain | |
dc.contributor.author | Mullender, Angelika | |
dc.contributor.author | Mack, Chris | |
dc.contributor.author | Charley, Anne-Laure | |
dc.contributor.author | Leray, Philippe | |
dc.contributor.author | De Gendt, Stefan | |
dc.contributor.author | Lorusso, Gian | |
dc.date.accessioned | 2024-01-22T15:29:06Z | |
dc.date.available | 2024-01-08T17:19:01Z | |
dc.date.available | 2024-01-22T15:29:06Z | |
dc.date.issued | 2023 | |
dc.identifier.issn | 1932-5150 | |
dc.identifier.other | WOS:001122013100016 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/43360.2 | |
dc.source | WOS | |
dc.title | Role of landing energy in e-beam metrology of thin photoresist for high-numerical aperture extreme ultraviolet lithography | |
dc.type | Journal article | |
dc.contributor.imecauthor | Zidan, Mohamed | |
dc.contributor.imecauthor | Severi, Joren | |
dc.contributor.imecauthor | De Simone, Danilo | |
dc.contributor.imecauthor | Moussa, Alain | |
dc.contributor.imecauthor | Charley, Anne-Laure | |
dc.contributor.imecauthor | Leray, Philippe | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.imecauthor | Lorusso, Gian | |
dc.contributor.orcidimec | De Simone, Danilo::0000-0003-3927-5207 | |
dc.contributor.orcidimec | Moussa, Alain::0000-0002-6377-4199 | |
dc.contributor.orcidimec | Charley, Anne-Laure::0000-0003-4745-0167 | |
dc.contributor.orcidimec | Leray, Philippe::0000-0002-1086-270X | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.contributor.orcidimec | Lorusso, Gian::0000-0003-3498-5082 | |
dc.date.embargo | 2023-06-10 | |
dc.identifier.doi | 10.1117/1.JMM.22.2.021002 | |
dc.source.numberofpages | 12 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 021002 | |
dc.source.endpage | NA | |
dc.source.journal | JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3 | |
dc.source.issue | 2 | |
dc.source.volume | 22 | |
imec.availability | Published - open access | |
dc.description.wosFundingText | This work was executed as part of imec's core partner program. Joren Severi received funding from Fonds Wetenschappelijk Onderzoek (FWO; 1SA8919N). This manuscript has been previously published in the SPIE Conference Proceedings Volume 12053, Metrology, Inspection, and Process Control XXXVI; 120530P (2022) https://doi.org/10.1117/12.2613990.11 | |