CoSi2 formation in the Ti/Co/SiO2/Si system

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Authors

Detavernier, C.; Van Meirhaeghe, R. L.; Cardon, F.; Maex, Karen; Bender, Hugo; Zhu, S. Y.

Issue

1

Journal

J. Appl. Physics

Volume

88

Title

CoSi2 formation in the Ti/Co/SiO2/Si system

Publication type

Journal article

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