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CoSi2 formation in the Ti/Co/SiO2/Si system

dc.contributor.authorDetavernier, C.
dc.contributor.authorVan Meirhaeghe, R. L.
dc.contributor.authorCardon, F.
dc.contributor.authorMaex, Karen
dc.contributor.authorBender, Hugo
dc.contributor.authorZhu, S. Y.
dc.date.accessioned2021-10-14T12:54:39Z
dc.date.available2021-10-14T12:54:39Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4337
dc.sourceIIOimport
dc.titleCoSi2 formation in the Ti/Co/SiO2/Si system
dc.typeJournal article
dc.contributor.imecauthorMaex, Karen
dc.contributor.imecauthorBender, Hugo
dc.source.peerreviewno
dc.source.beginpage133
dc.source.endpage140
dc.source.journalJ. Appl. Physics
dc.source.issue1
dc.source.volume88
imec.availabilityPublished - imec


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