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Improvements in the measurement of local critical dimension uniformity for holes and pillars

dc.contributor.authorMack, Chris A.
dc.contributor.authorDelvaux, Christie
dc.contributor.authorDe Simone, Danilo
dc.contributor.authorLorusso, Gian
dc.date.accessioned2024-04-16T08:55:08Z
dc.date.available2024-01-13T17:47:50Z
dc.date.available2024-04-16T08:55:08Z
dc.date.issued2023
dc.identifier.isbn978-1-5106-6748-8
dc.identifier.issn0277-786X
dc.identifier.otherWOS:001125089900015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/43404.2
dc.sourceWOS
dc.titleImprovements in the measurement of local critical dimension uniformity for holes and pillars
dc.typeProceedings paper
dc.contributor.imecauthorDelvaux, Christie
dc.contributor.imecauthorDe Simone, Danilo
dc.contributor.imecauthorLorusso, Gian
dc.contributor.orcidimecDe Simone, Danilo::0000-0003-3927-5207
dc.contributor.orcidimecLorusso, Gian::0000-0003-3498-5082
dc.identifier.doi10.1117/12.2688355
dc.identifier.eisbn978-1-5106-6749-5
dc.source.numberofpages8
dc.source.peerreviewyes
dc.source.beginpageArt. 127500G
dc.source.conferenceInternational Conference on Extreme Ultraviolet Lithography
dc.source.conferencedateOCT 02-05, 2023
dc.source.conferencelocationMonterey
dc.source.journalProceedings of SPIE
dc.source.volume12750
imec.availabilityPublished - imec


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