dc.contributor.author | Mack, Chris A. | |
dc.contributor.author | Delvaux, Christie | |
dc.contributor.author | De Simone, Danilo | |
dc.contributor.author | Lorusso, Gian | |
dc.date.accessioned | 2024-04-16T08:55:08Z | |
dc.date.available | 2024-01-13T17:47:50Z | |
dc.date.available | 2024-04-16T08:55:08Z | |
dc.date.issued | 2023 | |
dc.identifier.isbn | 978-1-5106-6748-8 | |
dc.identifier.issn | 0277-786X | |
dc.identifier.other | WOS:001125089900015 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/43404.2 | |
dc.source | WOS | |
dc.title | Improvements in the measurement of local critical dimension uniformity for holes and pillars | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Delvaux, Christie | |
dc.contributor.imecauthor | De Simone, Danilo | |
dc.contributor.imecauthor | Lorusso, Gian | |
dc.contributor.orcidimec | De Simone, Danilo::0000-0003-3927-5207 | |
dc.contributor.orcidimec | Lorusso, Gian::0000-0003-3498-5082 | |
dc.identifier.doi | 10.1117/12.2688355 | |
dc.identifier.eisbn | 978-1-5106-6749-5 | |
dc.source.numberofpages | 8 | |
dc.source.peerreview | yes | |
dc.source.beginpage | Art. 127500G | |
dc.source.conference | International Conference on Extreme Ultraviolet Lithography | |
dc.source.conferencedate | OCT 02-05, 2023 | |
dc.source.conferencelocation | Monterey | |
dc.source.journal | Proceedings of SPIE | |
dc.source.volume | 12750 | |
imec.availability | Published - imec | |