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Compact thermally stable high voltage FinFET with 40 nm tox and lateral break-down >35 V for 3D NAND flash periphery application

dc.contributor.authorSpessot, Alessio
dc.contributor.authorMatagne, Philippe
dc.contributor.authorArimura, Hiroaki
dc.contributor.authorGanguly, Jishnu
dc.contributor.authorRitzenthaler, Romain
dc.contributor.authorBastos, Joao
dc.contributor.authorSarkar, Ritam
dc.contributor.authorCapogreco, Elena
dc.contributor.authorChen, Y.
dc.contributor.authorHoriguchi, Naoto
dc.date.accessioned2025-07-24T13:00:58Z
dc.date.available2024-02-20T17:23:39Z
dc.date.available2025-07-24T13:00:58Z
dc.date.issued2024
dc.identifier.issn0021-4922
dc.identifier.otherWOS:001159914900001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/43568.2
dc.sourceWOS
dc.titleCompact thermally stable high voltage FinFET with 40 nm tox and lateral break-down >35 V for 3D NAND flash periphery application
dc.typeJournal article
dc.contributor.imecauthorSpessot, Alessio
dc.contributor.imecauthorMatagne, Philippe
dc.contributor.imecauthorArimura, Hiroaki
dc.contributor.imecauthorGanguly, Jishnu
dc.contributor.imecauthorRitzenthaler, Romain
dc.contributor.imecauthorBastos, Joao
dc.contributor.imecauthorSarkar, Ritam
dc.contributor.imecauthorCapogreco, Elena
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.orcidimecSpessot, Alessio::0000-0003-2381-0121
dc.contributor.orcidimecMatagne, Philippe::0000-0003-0365-2066
dc.contributor.orcidimecArimura, Hiroaki::0000-0002-3138-708X
dc.contributor.orcidimecRitzenthaler, Romain::0000-0002-8615-3272
dc.contributor.orcidimecBastos, Joao::0000-0002-8877-9850
dc.contributor.orcidimecSarkar, Ritam::0000-0001-7753-4658
dc.contributor.orcidimecCapogreco, Elena::0000-0003-3610-3629
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.identifier.doi10.35848/1347-4065/ad2138
dc.source.numberofpages7
dc.source.peerreviewyes
dc.source.beginpageArt. 03SP12
dc.source.endpageN/A
dc.source.journalJAPANESE JOURNAL OF APPLIED PHYSICS
dc.source.issue3
dc.source.volume63
imec.availabilityPublished - imec


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220.500.12860/43568.2*2025-07-24T12:46:26Zvalidation by library/open access desk
120.500.12860/435682024-02-20T17:23:39Z

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