dc.contributor.author | Lofrano, Melina | |
dc.contributor.author | Vermeersch, Bjorn | |
dc.contributor.author | Oprins, Herman | |
dc.contributor.author | Park, Seongho | |
dc.contributor.author | Tokei, Zsolt | |
dc.date.accessioned | 2024-02-29T08:41:31Z | |
dc.date.available | 2024-02-29T08:41:31Z | |
dc.date.issued | 2022 | |
dc.identifier.isbn | 978-1-6654-8503-6 | |
dc.identifier.issn | N/A | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/43602 | |
dc.title | Impact of FEOL cross heating on the thermal performance of advanced BEOL | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Lofrano, Melina | |
dc.contributor.imecauthor | Vermeersch, Bjorn | |
dc.contributor.imecauthor | Oprins, Herman | |
dc.contributor.imecauthor | Park, Seongho | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.contributor.orcidimec | Lofrano, Melina::0000-0002-3930-6459 | |
dc.contributor.orcidimec | Vermeersch, Bjorn::0000-0001-8640-672X | |
dc.contributor.orcidimec | Oprins, Herman::0000-0003-0680-4969 | |
dc.contributor.orcidimec | Tokei, Zsolt::0000-0003-3545-3424 | |
dc.date.embargo | 9999-12-31 | |
dc.source.numberofpages | 9 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 864 | |
dc.source.endpage | 872 | |
dc.source.conference | 21st IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm 2022) | |
dc.source.conferencedate | May 31, 2022 - June 3, 2022 | |
dc.source.conferencelocation | San Diego, CA | |
dc.source.journal | N/A | |
imec.availability | Published - imec | |