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The stability of Pt heater and temperature sensing elements for silicon integrated tin oxide gas sensors

dc.contributor.authorEsch, Heleen
dc.contributor.authorHuyberechts, Guido
dc.contributor.authorMertens, Robert
dc.contributor.authorMaes, Guido
dc.contributor.authorManca, Jean
dc.contributor.authorDe Ceuninck, Ward
dc.contributor.authorDe Schepper, Luc
dc.date.accessioned2021-10-14T12:57:09Z
dc.date.available2021-10-14T12:57:09Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4363
dc.sourceIIOimport
dc.titleThe stability of Pt heater and temperature sensing elements for silicon integrated tin oxide gas sensors
dc.typeJournal article
dc.contributor.imecauthorMertens, Robert
dc.contributor.imecauthorDe Ceuninck, Ward
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage190
dc.source.endpage192
dc.source.journalSensors and Actuators B
dc.source.volume65
imec.availabilityPublished - open access
imec.internalnotesProceedings of the 7th International Meeting on Chemical Sensors. July 1998. Beijing, China.


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