The stability of Pt heater and temperature sensing elements for silicon integrated tin oxide gas sensors
dc.contributor.author | Esch, Heleen | |
dc.contributor.author | Huyberechts, Guido | |
dc.contributor.author | Mertens, Robert | |
dc.contributor.author | Maes, Guido | |
dc.contributor.author | Manca, Jean | |
dc.contributor.author | De Ceuninck, Ward | |
dc.contributor.author | De Schepper, Luc | |
dc.date.accessioned | 2021-10-14T12:57:09Z | |
dc.date.available | 2021-10-14T12:57:09Z | |
dc.date.issued | 2000 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4363 | |
dc.source | IIOimport | |
dc.title | The stability of Pt heater and temperature sensing elements for silicon integrated tin oxide gas sensors | |
dc.type | Journal article | |
dc.contributor.imecauthor | Mertens, Robert | |
dc.contributor.imecauthor | De Ceuninck, Ward | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 190 | |
dc.source.endpage | 192 | |
dc.source.journal | Sensors and Actuators B | |
dc.source.volume | 65 | |
imec.availability | Published - open access | |
imec.internalnotes | Proceedings of the 7th International Meeting on Chemical Sensors. July 1998. Beijing, China. |