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The stability of Pt heater and temperature sensing elements for silicon integrated tin oxide gas sensors
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Authors
Esch, Heleen
;
Huyberechts, Guido
;
Mertens, Robert
;
Maes, Guido
;
Manca, Jean
;
De Ceuninck, Ward
;
De Schepper, Luc
Journal
Sensors and Actuators B
Volume
65
Title
The stability of Pt heater and temperature sensing elements for silicon integrated tin oxide gas sensors
Publication type
Journal article
Embargo date
9999-12-31
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