Publication:

The stability of Pt heater and temperature sensing elements for silicon integrated tin oxide gas sensors

Date

2000
Journal article
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dc.contributor.authorEsch, Heleen
dc.contributor.authorHuyberechts, Guido
dc.contributor.authorMertens, Robert
dc.contributor.authorMaes, Guido
dc.contributor.authorManca, Jean
dc.contributor.authorDe Ceuninck, Ward
dc.contributor.authorDe Schepper, Luc
dc.contributor.imecauthorMertens, Robert
dc.contributor.imecauthorDe Ceuninck, Ward
dc.date.accessioned2021-10-14T12:57:09Z
dc.date.available2021-10-14T12:57:09Z
dc.date.embargo9999-12-31
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4363
dc.source.beginpage190
dc.source.endpage192
dc.source.journalSensors and Actuators B
dc.source.volume65
dc.title

The stability of Pt heater and temperature sensing elements for silicon integrated tin oxide gas sensors

dc.typeJournal article
dspace.entity.typePublication
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