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SSRM and SCM observation of enhanced lateral As-diffusion induced by nitride spacers

dc.contributor.authorEyben, Pierre
dc.contributor.authorDuhayon, Natasja
dc.contributor.authorClarysse, Trudo
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorBadenes, Gonçal
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-14T12:57:17Z
dc.date.available2021-10-14T12:57:17Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4364
dc.sourceIIOimport
dc.titleSSRM and SCM observation of enhanced lateral As-diffusion induced by nitride spacers
dc.typeOral presentation
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorDuhayon, Natasja
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceMRS Spring Meeting 2000. Symposium B: Si Front-End Processing - Physics and Technology of Dopant-Defect Interactions II; 24-28 A
dc.source.conferencelocation
imec.availabilityPublished - open access


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