dc.contributor.author | Shimura, Yosuke | |
dc.contributor.author | Godfrin, Clement | |
dc.contributor.author | Hikavyy, Andriy | |
dc.contributor.author | Li, Roy | |
dc.contributor.author | Aguilera, Juan | |
dc.contributor.author | Katsaros, Georgios | |
dc.contributor.author | Favia, Paola | |
dc.contributor.author | Han, Han | |
dc.contributor.author | Wan, Danny | |
dc.contributor.author | De Greve, Kristiaan | |
dc.contributor.author | Loo, Roger | |
dc.date.accessioned | 2024-08-08T10:40:32Z | |
dc.date.available | 2024-03-27T17:34:18Z | |
dc.date.available | 2024-08-08T10:40:32Z | |
dc.date.issued | 2024 | |
dc.identifier.issn | 1369-8001 | |
dc.identifier.other | WOS:001188520000001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/43743.2 | |
dc.source | WOS | |
dc.title | Compressively strained epitaxial Ge layers for quantum computing applications | |
dc.type | Journal article | |
dc.contributor.imecauthor | Shimura, Yosuke | |
dc.contributor.imecauthor | Godfrin, Clement | |
dc.contributor.imecauthor | Hikavyy, Andriy | |
dc.contributor.imecauthor | Li, Roy | |
dc.contributor.imecauthor | Favia, Paola | |
dc.contributor.imecauthor | Han, Han | |
dc.contributor.imecauthor | Wan, Danny | |
dc.contributor.imecauthor | De Greve, Kristiaan | |
dc.contributor.imecauthor | Loo, Roger | |
dc.contributor.orcidimec | Shimura, Yosuke::0000-0002-1944-9970 | |
dc.contributor.orcidimec | Godfrin, Clement::0000-0002-5244-3474 | |
dc.contributor.orcidimec | Hikavyy, Andriy::0000-0002-8201-075X | |
dc.contributor.orcidimec | Li, Roy::0000-0002-2145-7590 | |
dc.contributor.orcidimec | Favia, Paola::0000-0002-1019-3497 | |
dc.contributor.orcidimec | Han, Han::0000-0003-2169-8332 | |
dc.contributor.orcidimec | Wan, Danny::0000-0003-4847-3184 | |
dc.contributor.orcidimec | De Greve, Kristiaan::0000-0002-1314-9715 | |
dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
dc.date.embargo | 2024-02-08 | |
dc.identifier.doi | 10.1016/j.mssp.2024.108231 | |
dc.source.numberofpages | 6 | |
dc.source.peerreview | yes | |
dc.source.beginpage | Art. 108231 | |
dc.source.endpage | N/A | |
dc.source.journal | MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING | |
dc.source.issue | N/A | |
dc.source.volume | 174 | |
imec.availability | Published - open access | |
dc.description.wosFundingText | The Ge project received funding from the European Union's Horizon Europe programme under the Grant Agreement 101069515 - IGNITE. Siltronic AG is acknowledged for providing the SRB wafers. This work was supported by Imec's Industrial Affiliation Program on Quantum Computing. | |