Publication:

Compressively strained epitaxial Ge layers for quantum computing applications

Date

2024
Journal article
https://doi.org/10.1016/j.mssp.2024.108231
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Author(s)

Shimura, Yosuke  
;
Godfrin, Clement  
;
Hikavyy, Andriy  
;
Li, Roy  
;
Aguilera, Juan
;
Katsaros, Georgios
;
Favia, Paola  
;
Han, Han  
;
Wan, Danny  
;
De Greve, Kristiaan  
;
Loo, Roger  

Journal

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

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