Compressively strained epitaxial Ge layers for quantum computing applications

Shimura, Yosuke; Godfrin, Clement; Hikavyy, Andriy; Li, Roy; Aguilera, Juan; Katsaros, Georgios; Favia, Paola; Han, Han; Wan, Danny; De Greve, Kristiaan; Loo, Roger

doi:10.1016/j.mssp.2024.108231

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Compressively strained epitaxial Ge layers for quantum computing applications

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2024

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https://doi.org/10.1016/j.mssp.2024.108231

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MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

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Compressively strained epitaxial Ge layers for quantum computing applications

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