Publication:

Compressively strained epitaxial Ge layers for quantum computing applications

Date

2024
Journal article
https://doi.org/10.1016/j.mssp.2024.108231
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dc.contributor.authorShimura, Yosuke
dc.contributor.authorGodfrin, Clement
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorLi, Roy
dc.contributor.authorAguilera, Juan
dc.contributor.authorKatsaros, Georgios
dc.contributor.authorFavia, Paola
dc.contributor.authorHan, Han
dc.contributor.authorWan, Danny
dc.contributor.authorDe Greve, Kristiaan
dc.contributor.authorLoo, Roger
dc.contributor.imecauthorShimura, Yosuke
dc.contributor.imecauthorGodfrin, Clement
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorLi, Roy
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorHan, Han
dc.contributor.imecauthorWan, Danny
dc.contributor.imecauthorDe Greve, Kristiaan
dc.contributor.imecauthorLoo, Roger
dc.contributor.orcidimecShimura, Yosuke::0000-0002-1944-9970
dc.contributor.orcidimecGodfrin, Clement::0000-0002-5244-3474
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecLi, Roy::0000-0002-2145-7590
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecHan, Han::0000-0003-2169-8332
dc.contributor.orcidimecWan, Danny::0000-0003-4847-3184
dc.contributor.orcidimecDe Greve, Kristiaan::0000-0002-1314-9715
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.accessioned2024-08-08T10:40:32Z
dc.date.available2024-03-27T17:34:18Z
dc.date.available2024-08-08T10:40:32Z
dc.date.embargo2024-02-08
dc.date.issued2024
dc.description.wosFundingTextThe Ge project received funding from the European Union's Horizon Europe programme under the Grant Agreement 101069515 - IGNITE. Siltronic AG is acknowledged for providing the SRB wafers. This work was supported by Imec's Industrial Affiliation Program on Quantum Computing.
dc.identifier.doi10.1016/j.mssp.2024.108231
dc.identifier.issn1369-8001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/43743
dc.publisherELSEVIER SCI LTD
dc.source.beginpageArt. 108231
dc.source.endpageN/A
dc.source.issueN/A
dc.source.journalMATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
dc.source.numberofpages6
dc.source.volume174
dc.title

Compressively strained epitaxial Ge layers for quantum computing applications

dc.typeJournal article
dspace.entity.typePublication
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