dc.contributor.author | Halbach, Chloe | |
dc.contributor.author | Segers, Jeremy | |
dc.contributor.author | Rochus, Veronique | |
dc.contributor.author | Georgitzikis, Epimitheas | |
dc.contributor.author | Heremans, Paul | |
dc.contributor.author | Cheyns, David | |
dc.date.accessioned | 2024-08-29T07:48:51Z | |
dc.date.available | 2024-04-14T16:53:35Z | |
dc.date.available | 2024-08-29T07:48:51Z | |
dc.date.issued | 2024 | |
dc.identifier.issn | 1084-6999 | |
dc.identifier.other | WOS:001174201100242 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/43828.2 | |
dc.source | WOS | |
dc.title | FABRICATION AND CHARACTERIZATION OF LARGE-AREA FLEXIBLE CAPACITIVE MICROMACHINED ULTRASOUND TRANSDUCERS | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Halbach, Chloe | |
dc.contributor.imecauthor | Segers, Jeremy | |
dc.contributor.imecauthor | Rochus, Veronique | |
dc.contributor.imecauthor | Georgitzikis, Epimitheas | |
dc.contributor.imecauthor | Heremans, Paul | |
dc.contributor.imecauthor | Cheyns, David | |
dc.contributor.orcidimec | Halbach, Chloe::0000-0001-6340-0237 | |
dc.contributor.orcidimec | Segers, Jeremy::0000-0002-0646-0652 | |
dc.contributor.orcidimec | Rochus, Veronique::0000-0001-9680-5724 | |
dc.contributor.orcidimec | Georgitzikis, Epimitheas::0000-0001-5972-8328 | |
dc.contributor.orcidimec | Heremans, Paul::0000-0003-2151-1718 | |
dc.contributor.orcidimec | Cheyns, David::0000-0002-1327-8752 | |
dc.identifier.doi | 10.1109/MEMS58180.2024.10439526 | |
dc.identifier.eisbn | 979-8-3503-5792-9 | |
dc.source.numberofpages | 4 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 943 | |
dc.source.endpage | 946 | |
dc.source.conference | 37th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) | |
dc.source.conferencedate | JAN 21-25, 2024 | |
dc.source.conferencelocation | Austin | |
dc.source.journal | N/A | |
imec.availability | Published - imec | |
dc.description.wosFundingText | This work was funded by an SB PhD fellowship of the Research Foundation-Flanders [FWO, 1S27524N]. | |
dc.description.wosFundingText | The authors would like to thank Tsung-Chieh Sun for his assistance in cleanroom processing, Clement Leruth for scanning electron microscopy (SEM), and Francois Berghmans for running the automatic prober. | |