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FABRICATION AND CHARACTERIZATION OF LARGE-AREA FLEXIBLE CAPACITIVE MICROMACHINED ULTRASOUND TRANSDUCERS

dc.contributor.authorHalbach, Chloe
dc.contributor.authorSegers, Jeremy
dc.contributor.authorRochus, Veronique
dc.contributor.authorGeorgitzikis, Epimitheas
dc.contributor.authorHeremans, Paul
dc.contributor.authorCheyns, David
dc.date.accessioned2024-08-29T07:48:51Z
dc.date.available2024-04-14T16:53:35Z
dc.date.available2024-08-29T07:48:51Z
dc.date.issued2024
dc.identifier.issn1084-6999
dc.identifier.otherWOS:001174201100242
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/43828.2
dc.sourceWOS
dc.titleFABRICATION AND CHARACTERIZATION OF LARGE-AREA FLEXIBLE CAPACITIVE MICROMACHINED ULTRASOUND TRANSDUCERS
dc.typeProceedings paper
dc.contributor.imecauthorHalbach, Chloe
dc.contributor.imecauthorSegers, Jeremy
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorGeorgitzikis, Epimitheas
dc.contributor.imecauthorHeremans, Paul
dc.contributor.imecauthorCheyns, David
dc.contributor.orcidimecHalbach, Chloe::0000-0001-6340-0237
dc.contributor.orcidimecSegers, Jeremy::0000-0002-0646-0652
dc.contributor.orcidimecRochus, Veronique::0000-0001-9680-5724
dc.contributor.orcidimecGeorgitzikis, Epimitheas::0000-0001-5972-8328
dc.contributor.orcidimecHeremans, Paul::0000-0003-2151-1718
dc.contributor.orcidimecCheyns, David::0000-0002-1327-8752
dc.identifier.doi10.1109/MEMS58180.2024.10439526
dc.identifier.eisbn979-8-3503-5792-9
dc.source.numberofpages4
dc.source.peerreviewyes
dc.source.beginpage943
dc.source.endpage946
dc.source.conference37th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
dc.source.conferencedateJAN 21-25, 2024
dc.source.conferencelocationAustin
dc.source.journalN/A
imec.availabilityPublished - imec
dc.description.wosFundingTextThis work was funded by an SB PhD fellowship of the Research Foundation-Flanders [FWO, 1S27524N].
dc.description.wosFundingTextThe authors would like to thank Tsung-Chieh Sun for his assistance in cleanroom processing, Clement Leruth for scanning electron microscopy (SEM), and Francois Berghmans for running the automatic prober.


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