Authors

Grau, Lluis; Augendre, Emmanuel; Simoen, Eddy; Rooyackers, Rita; Claeys, Cor; Badenes, Gonçal; Romano-Rodriguez, A.

Conference

3rd International Conference Materials for Microelectronics

Title

Processing factors influencing the leakage current in shallow junction diodes for deep submicron CMOS

Publication type

Proceedings paper

Embargo date

9999-12-31