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Advanced characterization of 2D materials using SEM image processing and machine learning

dc.contributor.authorSaib, Mohamed
dc.contributor.authorMoussa, Alain
dc.contributor.authorBeggiato, Matteo
dc.contributor.authorGroven, Benjamin
dc.contributor.authorMedina Silva, Henry
dc.contributor.authorMorin, Pierre
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorKar, Gouri Sankar
dc.contributor.authorCharley, Anne-Laure
dc.date.accessioned2024-08-19T15:00:28Z
dc.date.available2024-06-15T17:25:54Z
dc.date.available2024-08-19T15:00:28Z
dc.date.issued2024
dc.identifier.isbn978-1-5106-7216-1
dc.identifier.issn0277-786X
dc.identifier.otherWOS:001224296200024
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/44053.2
dc.sourceWOS
dc.titleAdvanced characterization of 2D materials using SEM image processing and machine learning
dc.typeProceedings paper
dc.contributor.imecauthorSaib, Mohamed
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorBeggiato, Matteo
dc.contributor.imecauthorGroven, Benjamin
dc.contributor.imecauthorMorin, Pierre
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorKar, Gouri Sankar
dc.contributor.imecauthorCharley, Anne-Laure
dc.contributor.imecauthorMedina Silva, Henry
dc.contributor.orcidimecSaib, Mohamed::0000-0002-5153-5553
dc.contributor.orcidimecMoussa, Alain::0000-0002-6377-4199
dc.contributor.orcidimecBeggiato, Matteo::0000-0003-0873-9021
dc.contributor.orcidimecGroven, Benjamin::0000-0002-5781-7594
dc.contributor.orcidimecMorin, Pierre::0000-0002-4637-496X
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecCharley, Anne-Laure::0000-0003-4745-0167
dc.contributor.orcidimecMedina Silva, Henry::0000-0003-1461-5703
dc.date.embargo2024-04-09
dc.identifier.doi10.1117/12.3014378
dc.identifier.eisbn978-1-5106-7217-8
dc.source.numberofpages15
dc.source.peerreviewyes
dc.source.beginpage129550X
dc.source.conferenceConference on Metrology, Inspection, and Process Control XXXVIII
dc.source.conferencedateFEB 26-29, 2024
dc.source.conferencelocationSan Jose
dc.source.journalProceedings of SPIE
dc.source.volume12955
imec.availabilityPublished - open access


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220.500.12860/44053.2*2024-08-19T14:58:26Zvalidation by library/open access desk
120.500.12860/440532024-06-15T17:25:54Z

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