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The peel-off probe: a cost-effective probe for electrical atomic force microscopy

dc.contributor.authorHantschel, Thomas
dc.contributor.authorSlesazeck, Stefan
dc.contributor.authorDuhayon, Natasja
dc.contributor.authorXu, Mingwei
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-14T13:02:46Z
dc.date.available2021-10-14T13:02:46Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4417
dc.sourceIIOimport
dc.titleThe peel-off probe: a cost-effective probe for electrical atomic force microscopy
dc.typeProceedings paper
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorDuhayon, Natasja
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.source.peerreviewno
dc.source.beginpage50
dc.source.endpage59
dc.source.conferenceMaterials and Device Characterization in Micromachining III
dc.source.conferencedate17/09/2000
dc.source.conferencelocationSanta Clara, CA USA
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol. 4175


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