Integrating diamond pyramids into metal cantilevers and using them as electrical AFM probes

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Authors
Hantschel, Thomas; Slesazeck, Stefan; Vandervorst, Wilfried
Conference
Micro- and Nano-engineering Conference; September 2000; Jena, Germany.
Title
Integrating diamond pyramids into metal cantilevers and using them as electrical AFM probes
Publication type
Oral presentation
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