Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Conference contributions
EFTEM analysis of the interaction of CO with a fluorinated organic dielectric
Publication:
EFTEM analysis of the interaction of CO with a fluorinated organic dielectric
Copy permalink
Date
2000
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
4415.pdf
217.61 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hens, S.
;
Van Landuyt, J.
;
Bender, Hugo
;
Lanckmans, Filip
;
Maex, Karen
Journal
Abstract
Description
Metrics
Views
1903
since deposited on 2021-10-14
2
last month
Acq. date: 2026-01-07
Citations
Metrics
Views
1903
since deposited on 2021-10-14
2
last month
Acq. date: 2026-01-07
Citations