Publication:
Variation in the fixed charge density of SiOx/ZrO2 gate dielectric stacks during postdeposition oxidation
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Views
1976 since deposited on 2021-10-14
Acq. date: 2026-03-17
Citations
Statistics
Views
1976 since deposited on 2021-10-14
Acq. date: 2026-03-17
Citations