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Variation in the fixed charge density of SiOx/ZrO2 gate dielectric stacks during postdeposition oxidation
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Authors
Houssa, Michel
;
Afanas'ev, V. V.
;
Stesmans, Andre
;
Heyns, Marc
Issue
12
Journal
Applied Physics Letters
Volume
77
Title
Variation in the fixed charge density of SiOx/ZrO2 gate dielectric stacks during postdeposition oxidation
Publication type
Journal article
Embargo date
9999-12-31
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