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Variation in the fixed charge density of SiOx/ZrO2 gate dielectric stacks during postdeposition oxidation
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1975 since deposited on 2021-10-14
2last month
Acq. date: 2026-01-11
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Metrics
Views
1975 since deposited on 2021-10-14
2last month
Acq. date: 2026-01-11
Citations