Process-Induced Modulation of Domain Orientations during WS2 Epitaxy by Metal-Organic Chemical Vapor Deposition on Sapphire

Verdin, Joris; Medina Silva, Henry; Nalin Mehta, Ankit; Kandybka, Iryna; Groven, Benjamin; Kumar, Pawan; Koylan, Serkan; Sergeant, Stefanie; Favia, Paola; Morin, Pierre; Delabie, Annelies

doi:10.1021/acsaelm.4c01182

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Process-Induced Modulation of Domain Orientations during WS2 Epitaxy by Metal-Organic Chemical Vapor Deposition on Sapphire

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2024

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https://doi.org/10.1021/acsaelm.4c01182

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ACS APPLIED ELECTRONIC MATERIALS

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Process-Induced Modulation of Domain Orientations during WS2 Epitaxy by Metal-Organic Chemical Vapor Deposition on Sapphire

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