Show simple item record

Quantification of elements at the Si/SiO2-interface

dc.contributor.authorJanssens, Tom
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-14T13:06:40Z
dc.date.available2021-10-14T13:06:40Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4452
dc.sourceIIOimport
dc.titleQuantification of elements at the Si/SiO2-interface
dc.typeProceedings paper
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage401
dc.source.endpage404
dc.source.conferenceSecondary Ion Mass Spectrometry - SIMS XII. Proceedings of the 12th International Conference
dc.source.conferencedate5/09/1999
dc.source.conferencelocationBrussel Belgium
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
4446.pdf
Size:
220.8Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record