A flat-panel-display compatible ultrasound platform

Abstract

We present a thin-film piezoelectric micromachined ultrasonic transducer (PMUT) technology compatible with flat-panel manufacturing methods. Using the developed flow which is based on a low temperature AlScN piezoelectric layer, we fabricate large area 48x48 element PMUT arrays on glass. Beam steering and ultrasound medical imaging are demonstrated. The developed transducer technology can be combined with a TFT backplane and has the potential of direct integration on top of display size glass sheets, expanding the boundaries of ultrasound application domains