Publication:

Advanced CMOS manufacturing of superconducting qubits on 300 mm wafers

Date

2024
Journal article
https://doi.org/10.1038/s41586-024-07941-9
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Published version 4.94 MB

Author(s)

Van Damme, Jacques  
;
Massar, Shana  
;
Acharya, Rohith  
;
Ivanov, Tsvetan  
;
Perez Lozano, Daniel  
;
Canvel, Yann  
;
Demarets, Mael  
;
Vangoidsenhoven, Diziana  
;
Hermans, Yannick  
;
Lai, J. G.
;
Ananthapadmanabha Rao, Vadiraj  
;
Mongillo, Massimo  
;
Wan, Danny  
;
De Boeck, Jo  
;
Potocnik, Anton  
;
De Greve, Kristiaan  

Journal

NATURE

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323 since deposited on 2024-10-12
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183 since deposited on 2024-10-12
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Acq. date: 2026-10-04

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