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Low-loss, multi-reticle stitched SiN waveguides for 300mm wafer-level optical interconnects

dc.contributor.authorXu, Pengfei
dc.contributor.authorMarchese, Chiara
dc.contributor.authorLepage, Guy
dc.contributor.authorGolshani, Negin
dc.contributor.authorVan Eenaeme, Ruben
dc.contributor.authorMingardi, Andrea
dc.contributor.authorVan Ongeval, Joost
dc.contributor.authorMagdziak, Rafal
dc.contributor.authorHalipre, Luc
dc.contributor.authorTrivkovic, Darko
dc.contributor.authorVerheyen, Peter
dc.contributor.authorChakrabarti, Maumita
dc.contributor.authorVelenis, Dimitrios
dc.contributor.authorMiller, Andy
dc.contributor.authorFerraro, Filippo
dc.contributor.authorBan, Yoojin
dc.contributor.authorVan Campenhout, Joris
dc.date.accessioned2025-04-17T13:44:00Z
dc.date.available2024-10-17T18:45:08Z
dc.date.available2025-04-17T13:44:00Z
dc.date.issued2024
dc.identifier.isbn979-8-3503-7758-3
dc.identifier.issnN/A
dc.identifier.otherWOS:001242671400688
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/44649.2
dc.sourceWOS
dc.titleLow-loss, multi-reticle stitched SiN waveguides for 300mm wafer-level optical interconnects
dc.typeProceedings paper
dc.contributor.imecauthorXu, Pengfei
dc.contributor.imecauthorMarchese, Chiara
dc.contributor.imecauthorLepage, Guy
dc.contributor.imecauthorGolshani, Negin
dc.contributor.imecauthorVan Eenaeme, Ruben
dc.contributor.imecauthorMingardi, Andrea
dc.contributor.imecauthorVan Ongeval, Joost
dc.contributor.imecauthorMagdziak, Rafal
dc.contributor.imecauthorHalipre, Luc
dc.contributor.imecauthorTrivkovic, Darko
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorChakrabarti, Maumita
dc.contributor.imecauthorVelenis, Dimitrios
dc.contributor.imecauthorMiller, Andy
dc.contributor.imecauthorFerraro, Filippo
dc.contributor.imecauthorBan, Yoojin
dc.contributor.imecauthorVan Campenhout, Joris
dc.contributor.orcidimecMarchese, Chiara::0009-0000-3734-5473
dc.contributor.orcidimecLepage, Guy::0000-0002-3883-4452
dc.contributor.orcidimecGolshani, Negin::0000-0002-1299-0641
dc.contributor.orcidimecMagdziak, Rafal::0009-0007-0378-302X
dc.contributor.orcidimecHalipre, Luc::0009-0001-5469-6686
dc.contributor.orcidimecTrivkovic, Darko::0009-0003-7858-1802
dc.contributor.orcidimecVerheyen, Peter::0000-0002-8245-9442
dc.contributor.orcidimecChakrabarti, Maumita::0000-0003-4584-0399
dc.contributor.orcidimecVelenis, Dimitrios::0000-0001-7947-8098
dc.contributor.orcidimecMiller, Andy::0000-0001-7048-2242
dc.contributor.orcidimecFerraro, Filippo::0000-0002-9328-5548
dc.contributor.orcidimecBan, Yoojin::0000-0001-7319-8132
dc.contributor.orcidimecVan Campenhout, Joris::0000-0003-0778-2669
dc.contributor.orcidimecMingardi, Andrea::0000-0002-8426-7233
dc.identifier.doi10.1364/OFC.2024.M4A.3
dc.source.numberofpages3
dc.source.peerreviewyes
dc.source.conferenceOptical Fiber Communications Conference and Exhibition (OFC)
dc.source.conferencedateMAR 24-28, 2024
dc.source.conferencelocationSan Diego
dc.source.journalN/A
imec.availabilityPublished - imec
dc.description.wosFundingTextThis work was supported by imec's industry-affiliation R&D program "Optical I/O".


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220.500.12860/44649.2*2025-04-17T13:42:52Zvalidation by library/open access desk
120.500.12860/446492024-10-17T18:45:08Z

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