Authors

Kobayashi, K.; Ohyama, Hidenori; Hayama, Kiyoteru; Takami, Y.; Simoen, Eddy; Poyai, Amporn; Claeys, C.

Conference

BIAMS - 6th International Workshop on Beam Injection Assessment of Microstructures in Semiconductors; 12-16 November 2000; Fukuo

Title

Assessment of radiation induced lattice damage in shallow trench isolation diodes irradiated by neutrons

Publication type

Oral presentation