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Elemental mapping of sub-μm particles and structures by laser-SNMS and TOF-SIMS

dc.contributor.authorKollmer, F.
dc.contributor.authorKamischke, R.
dc.contributor.authorOstendorf, R.
dc.contributor.authorBender, Hugo
dc.contributor.authorBenninghoven, A.
dc.date.accessioned2021-10-14T13:10:59Z
dc.date.available2021-10-14T13:10:59Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4490
dc.sourceIIOimport
dc.titleElemental mapping of sub-μm particles and structures by laser-SNMS and TOF-SIMS
dc.typeOral presentation
dc.contributor.imecauthorBender, Hugo
dc.source.peerreviewno
dc.source.conference47th International Symposium of the American Vacuum Society. Session on Materials Characterization, Evolving Technologies in Sur
dc.source.conferencelocation
imec.availabilityPublished - imec


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