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A 300mm silicon nitride photonic platform for ultra low loss in the visible spectrum

dc.contributor.authorZhou, Di
dc.contributor.authorCallori, Giacomo
dc.contributor.authorVereecke, Bart
dc.contributor.authorHelin, Philippe
dc.contributor.authorLeyssens, Kenny
dc.contributor.authorVecchio, Emma
dc.contributor.authorMoelants, Myriam
dc.date.accessioned2025-06-23T13:16:30Z
dc.date.available2024-12-04T17:02:32Z
dc.date.available2025-06-23T13:16:30Z
dc.date.issued2024
dc.identifier.issn2160-5033
dc.identifier.otherWOS:001327768000019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/44912.2
dc.sourceWOS
dc.titleA 300mm silicon nitride photonic platform for ultra low loss in the visible spectrum
dc.typeProceedings paper
dc.contributor.imecauthorZhou, Di
dc.contributor.imecauthorCallori, Giacomo
dc.contributor.imecauthorVereecke, Bart
dc.contributor.imecauthorHelin, Philippe
dc.contributor.imecauthorLeyssens, Kenny
dc.contributor.imecauthorVecchio, Emma
dc.contributor.imecauthorMoelants, Myriam
dc.contributor.orcidimecCallori, Giacomo::0000-0002-8686-8059
dc.contributor.orcidimecVereecke, Bart::0009-0008-4313-622X
dc.contributor.orcidimecHelin, Philippe::0009-0002-8620-273X
dc.contributor.orcidimecMoelants, Myriam::0009-0002-8518-2802
dc.contributor.orcidimecZhou, Di::0000-0002-4537-5186
dc.identifier.doi10.1109/OMN61224.2024.10685238
dc.identifier.eisbn979-8-3503-8492-5
dc.source.numberofpages2
dc.source.peerreviewyes
dc.source.conferenceInternational Conference on Optical MEMS and Nanophotonics (OMN)
dc.source.conferencedateJUL 28-AUG 01, 2024
dc.source.conferencelocationSan Sebastian
dc.source.journalN/A
imec.availabilityPublished - imec


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220.500.12860/44912.2*2025-06-23T13:15:36Zvalidation by library/open access desk
120.500.12860/449122024-12-04T17:02:32Z

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