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Process Development and Characterization of Ru-based UBM for In Bumps Integration for Quantum Computing Applications

dc.contributor.authorLe Tulzo, Harold
dc.contributor.authorBijou, Diane
dc.contributor.authorSouza, Therese
dc.contributor.authorGallegos, Anthony
dc.contributor.authorThomas, Candice
dc.contributor.authorDeschaseaux, Edouard
dc.contributor.authorFeautrier, Celine
dc.contributor.authorCharbonnier, Jean
dc.contributor.authorGueugnot, Alain
dc.contributor.authorDerakhshandeh, Jaber
dc.contributor.authorHussain, Tassawar
dc.contributor.authorDaviot, Jerome
dc.date.accessioned2025-07-31T09:13:38Z
dc.date.available2024-12-07T16:57:02Z
dc.date.available2025-07-31T09:13:38Z
dc.date.issued2024
dc.identifier.isbn979-8-3503-7599-2
dc.identifier.issn0569-5503
dc.identifier.otherWOS:001260983500062
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/44936.2
dc.sourceWOS
dc.titleProcess Development and Characterization of Ru-based UBM for In Bumps Integration for Quantum Computing Applications
dc.typeProceedings paper
dc.contributor.imecauthorDerakhshandeh, Jaber
dc.contributor.imecauthorHussain, Tassawar
dc.contributor.orcidimecDerakhshandeh, Jaber::0000-0003-2448-9165
dc.contributor.orcidimecHussain, Tassawar::0000-0002-8916-7135
dc.identifier.doi10.1109/ECTC51529.2024.00068
dc.identifier.eisbn979-8-3503-7598-5
dc.source.numberofpages8
dc.source.peerreviewyes
dc.source.beginpage378
dc.source.endpage385
dc.source.conferenceIEEE 74th Electronic Components and Technology Conference (ECTC)
dc.source.conferencedateMAY 28-31, 2024
dc.source.conferencelocationDenver
dc.source.journalN/A
imec.availabilityPublished - imec
dc.description.wosFundingTextThis project leading to this application has received funding from the ECSEL Joint Undertaking (JU) under grant agreement No 101007322. The JU receives support from the European Union's Horizon 2020 research and innovation program and Germany, France, Belgium, Austria, Netherlands, Finland, Israel. (Please visit the project website www.matqu.eu for more information). The authors would also like to thank Fabrice Tanic, Tofana Costa, and Tasnime Laib for their dedication to experimental work and all Technic team for fruitful discussions.


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220.500.12860/44936.2*2025-07-31T09:12:01Zvalidation by library/open access desk
120.500.12860/449362024-12-07T16:57:02Z

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