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Direct copper electroplating

dc.contributor.authorLantasov, Yuri
dc.contributor.authorPalmans, Roger
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-14T13:14:10Z
dc.date.available2021-10-14T13:14:10Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4516
dc.sourceIIOimport
dc.titleDirect copper electroplating
dc.typeProceedings paper
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpage31
dc.source.endpage31
dc.source.conferenceAdvanced Metallization Conference; 3-5 October 2000; San Diego, Ca, USA. To be published in 2001.
dc.source.conferencelocation
imec.availabilityPublished - imec


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