Show simple item record

Comparative study of Ni-silicide and Co-silicide for sub 0.25-μm technologies

dc.contributor.authorLauwers, A.
dc.contributor.authorBesser, Paul
dc.contributor.authorGutt, T.
dc.contributor.authorSatta, Alessandra
dc.contributor.authorde Potter de ten Broeck, Muriel
dc.contributor.authorLindsay, Richard
dc.contributor.authorRoelandts, Nico
dc.contributor.authorLoosen, Fred
dc.contributor.authorJin, S.
dc.contributor.authorBender, Hugo
dc.contributor.authorStucchi, Michele
dc.contributor.authorVrancken, Evi
dc.contributor.authorDeweerdt, Bruno
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-14T13:15:19Z
dc.date.available2021-10-14T13:15:19Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4524
dc.sourceIIOimport
dc.titleComparative study of Ni-silicide and Co-silicide for sub 0.25-μm technologies
dc.typeJournal article
dc.contributor.imecauthorBesser, Paul
dc.contributor.imecauthorde Potter de ten Broeck, Muriel
dc.contributor.imecauthorLoosen, Fred
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorStucchi, Michele
dc.contributor.imecauthorVrancken, Evi
dc.contributor.imecauthorDeweerdt, Bruno
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpage103
dc.source.endpage116
dc.source.journalMicroelectronic Engineering
dc.source.issue1_4
dc.source.volume50
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record