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Comparative study of Ni-silicide and Co-silicide for sub 0.25-μm technologies
Publication:
Comparative study of Ni-silicide and Co-silicide for sub 0.25-μm technologies
Date
2000
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lauwers, A.
;
Besser, Paul
;
Gutt, T.
;
Satta, Alessandra
;
de Potter de ten Broeck, Muriel
;
Lindsay, Richard
;
Roelandts, Nico
;
Loosen, Fred
;
Jin, S.
;
Bender, Hugo
;
Stucchi, Michele
;
Vrancken, Evi
;
Deweerdt, Bruno
;
Maex, Karen
Journal
Microelectronic Engineering
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1956
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1956
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations