Publication:

Comparative study of Ni-silicide and Co-silicide for sub 0.25-μm technologies

Date

2000
Journal article
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Author(s)

Lauwers, A.
;
Besser, Paul  
;
Gutt, T.
;
Satta, Alessandra
;
de Potter de ten Broeck, Muriel  
;
Lindsay, Richard
;
Roelandts, Nico
;
Loosen, Fred  
;
Jin, S.
;
Bender, Hugo  
;
Stucchi, Michele  
;
Vrancken, Evi  
;
Deweerdt, Bruno  
;
Maex, Karen  

Journal

Microelectronic Engineering

Abstract

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1962 since deposited on 2021-10-14
Acq. date: 2026-06-11

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1962 since deposited on 2021-10-14
Acq. date: 2026-06-11

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