Publication:

Comparative study of Ni-silicide and Co-silicide for sub 0.25-μm technologies

Date

2000

Journal article

Simple item page Full metadata Statistics

Author(s)

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Satta, Alessandra

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de Potter de ten Broeck, Muriel

;

Lindsay, Richard

;

Roelandts, Nico

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;

Stucchi, Michele

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;

Deweerdt, Bruno

;

Journal

Microelectronic Engineering

Statistics

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Acq. date: 2026-04-26