Publication:

Comparative study of Ni-silicide and Co-silicide for sub 0.25-μm technologies

Date

2000
Journal article
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dc.contributor.authorLauwers, A.
dc.contributor.authorBesser, Paul
dc.contributor.authorGutt, T.
dc.contributor.authorSatta, Alessandra
dc.contributor.authorde Potter de ten Broeck, Muriel
dc.contributor.authorLindsay, Richard
dc.contributor.authorRoelandts, Nico
dc.contributor.authorLoosen, Fred
dc.contributor.authorJin, S.
dc.contributor.authorBender, Hugo
dc.contributor.authorStucchi, Michele
dc.contributor.authorVrancken, Evi
dc.contributor.authorDeweerdt, Bruno
dc.contributor.authorMaex, Karen
dc.contributor.imecauthorBesser, Paul
dc.contributor.imecauthorde Potter de ten Broeck, Muriel
dc.contributor.imecauthorLoosen, Fred
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorStucchi, Michele
dc.contributor.imecauthorVrancken, Evi
dc.contributor.imecauthorDeweerdt, Bruno
dc.contributor.imecauthorMaex, Karen
dc.date.accessioned2021-10-14T13:15:19Z
dc.date.available2021-10-14T13:15:19Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4524
dc.source.beginpage103
dc.source.endpage116
dc.source.issue1_4
dc.source.journalMicroelectronic Engineering
dc.source.volume50
dc.title

Comparative study of Ni-silicide and Co-silicide for sub 0.25-μm technologies

dc.typeJournal article
dspace.entity.typePublication
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