Thermal desorption issues related to silicidation and back-end metallization

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Authors
Li, Hua; Vereecke, Guy; Schaekers, Marc; Baklanov, Mikhaïl; Sleeckx, Erik; Maex, Karen; Froyen, L.
Conference
Advanced Metallization Conference 1999 - AMC 1999
Title
Thermal desorption issues related to silicidation and back-end metallization
Publication type
Proceedings paper
Embargo date
9999-12-31
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