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Demonstration of MP18-26nm Ru Semi-Damascene Spacer-is-Dielectric SADP Integration

dc.contributor.authorWu, Chen
dc.contributor.authorDecoster, Stefan
dc.contributor.authorRenaud, Vincent
dc.contributor.authorHermans, Yannick
dc.contributor.authorMarien, Philippe
dc.contributor.authorMarti, Giulio
dc.contributor.authorHeylen, Nancy
dc.contributor.authorKenens, Bart
dc.contributor.authorRoy, Syamashree
dc.contributor.authorUlu Okudur, Fulya
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorReddy, Naveen
dc.contributor.authorSepulveda Marquez, Alfonso
dc.contributor.authorDelie, Gilles
dc.contributor.authorGupta, Anshul
dc.contributor.authorLesniewska, Alicja
dc.contributor.authorMurdoch, Gayle
dc.contributor.authorPark, Seongho
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2025-08-05T07:51:07Z
dc.date.available2025-03-06T20:45:30Z
dc.date.available2025-08-05T07:51:07Z
dc.date.issued2024
dc.identifier.isbn979-8-3503-8518-2
dc.identifier.issn2380-632X
dc.identifier.otherWOS:001411360600003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/45320.2
dc.sourceWOS
dc.titleDemonstration of MP18-26nm Ru Semi-Damascene Spacer-is-Dielectric SADP Integration
dc.typeProceedings paper
dc.contributor.imecauthorWu, Chen
dc.contributor.imecauthorDecoster, Stefan
dc.contributor.imecauthorRenaud, Vincent
dc.contributor.imecauthorHermans, Yannick
dc.contributor.imecauthorMarien, Philippe
dc.contributor.imecauthorMarti, Giulio
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorKenens, Bart
dc.contributor.imecauthorRoy, Syamashree
dc.contributor.imecauthorReddy, Naveen
dc.contributor.imecauthorDelie, Gilles
dc.contributor.imecauthorGupta, Anshul
dc.contributor.imecauthorLesniewska, Alicja
dc.contributor.imecauthorMurdoch, Gayle
dc.contributor.imecauthorPark, Seongho
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorUlu Okudur, Fulya
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorSepulveda Marquez, Alfonso
dc.contributor.orcidimecWu, Chen::0000-0002-4636-8842
dc.contributor.orcidimecDecoster, Stefan::0000-0003-1162-9288
dc.contributor.orcidimecRenaud, Vincent::0009-0009-7686-4474
dc.contributor.orcidimecHermans, Yannick::0000-0002-6973-0795
dc.contributor.orcidimecMarien, Philippe::0000-0001-5644-4442
dc.contributor.orcidimecHeylen, Nancy::0009-0008-0490-0993
dc.contributor.orcidimecKenens, Bart::0000-0003-2329-5449
dc.contributor.orcidimecRoy, Syamashree::0009-0009-3247-3252
dc.contributor.orcidimecReddy, Naveen::0000-0003-0163-485X
dc.contributor.orcidimecDelie, Gilles::0000-0002-5646-3261
dc.contributor.orcidimecGupta, Anshul::0000-0003-4276-5397
dc.contributor.orcidimecLesniewska, Alicja::0000-0003-3863-065X
dc.contributor.orcidimecMurdoch, Gayle::0000-0002-6833-220X
dc.contributor.orcidimecPark, Seongho::0000-0002-1058-9424
dc.contributor.orcidimecTokei, Zsolt::0000-0003-3545-3424
dc.contributor.orcidimecUlu Okudur, Fulya::0000-0002-8046-7748
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecSepulveda Marquez, Alfonso::0000-0003-4726-177X
dc.identifier.doi10.1109/IITC61274.2024.10732062
dc.identifier.eisbn979-8-3503-8517-5
dc.source.numberofpages3
dc.source.peerreviewyes
dc.source.conference2024 International Interconnect Technology Conference
dc.source.conferencedateJUN 03-06, 2024
dc.source.conferencelocationSan Jose
dc.source.journalN/A
imec.availabilityPublished - imec


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220.500.12860/45320.2*2025-08-05T07:47:29Zvalidation by library/open access desk
120.500.12860/453202025-03-06T20:45:30Z

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