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Fabrication of Superconducting Nb Airbridges in a 300 mm Pilot Line for Quantum Technologies

dc.contributor.authorWan, Danny
dc.contributor.authorMongillo, Massimo
dc.contributor.authorCanvel, Yann
dc.contributor.authorPerez Lozano, Daniel
dc.contributor.authorTobback, Bert
dc.contributor.authorIvanov, Tsvetan
dc.contributor.authorPacco, Antoine
dc.contributor.authorPiao, Xiaoyu
dc.contributor.authorMassar, Shana
dc.contributor.authorPotocnik, Anton
dc.contributor.authorDe Greve, Kristiaan
dc.date.accessioned2025-06-05T14:24:12Z
dc.date.available2025-03-06T20:46:06Z
dc.date.available2025-06-05T14:24:12Z
dc.date.issued2024
dc.identifier.isbn979-8-3503-8518-2
dc.identifier.issn2380-632X
dc.identifier.otherWOS:001411360600013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/45330.2
dc.sourceWOS
dc.titleFabrication of Superconducting Nb Airbridges in a 300 mm Pilot Line for Quantum Technologies
dc.typeProceedings paper
dc.contributor.imecauthorWan, Danny
dc.contributor.imecauthorMongillo, Massimo
dc.contributor.imecauthorCanvel, Yann
dc.contributor.imecauthorTobback, Bert
dc.contributor.imecauthorIvanov, Tsvetan
dc.contributor.imecauthorPacco, Antoine
dc.contributor.imecauthorPiao, Xiaoyu
dc.contributor.imecauthorMassar, Shana
dc.contributor.imecauthorPotocnik, Anton
dc.contributor.imecauthorDe Greve, Kristiaan
dc.contributor.imecauthorPerez Lozano, Daniel
dc.contributor.orcidimecWan, Danny::0000-0003-4847-3184
dc.contributor.orcidimecMongillo, Massimo::0000-0002-6475-6320
dc.contributor.orcidimecCanvel, Yann::0009-0006-7501-9787
dc.contributor.orcidimecIvanov, Tsvetan::0000-0003-3407-2742
dc.contributor.orcidimecPacco, Antoine::0000-0001-6330-5053
dc.contributor.orcidimecPiao, Xiaoyu::0000-0002-2204-9636
dc.contributor.orcidimecMassar, Shana::0000-0002-5329-4677
dc.contributor.orcidimecPotocnik, Anton::0000-0002-0352-6388
dc.contributor.orcidimecDe Greve, Kristiaan::0000-0002-1314-9715
dc.contributor.orcidimecPerez Lozano, Daniel::0000-0003-3098-3266
dc.identifier.doi10.1109/IITC61274.2024.10732203
dc.identifier.eisbn979-8-3503-8517-5
dc.source.numberofpages3
dc.source.peerreviewyes
dc.source.conference2024 International Interconnect Technology Conference
dc.source.conferencedateJUN 03-06, 2024
dc.source.conferencelocationSan Jose
dc.source.journalN/A
imec.availabilityPublished - imec
dc.description.wosFundingTextThe authors gratefully thank Jeroen Heijlen, Hans Pollenus, and the imec Pline for operational support, and the imec MCA team for metrology support. This work was supported in part by the imec Industrial Affiliation Program on Quantum Computing. This work was also supported in part by the MATQU project, which is funded through the ECSEL Joint Undertaking (JU) under grant agreement No 101007322.


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220.500.12860/45330.2*2025-06-05T14:21:53Zvalidation by library/open access desk
120.500.12860/453302025-03-06T20:46:06Z

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