| dc.contributor.author | Chehadi, Zeinab | |
| dc.contributor.author | Daubriac, Richard | |
| dc.contributor.author | Lu, Lu | |
| dc.contributor.author | Huet, Karim | |
| dc.contributor.author | Tokei, Zsolt | |
| dc.contributor.author | Cancellara, Leonardo | |
| dc.contributor.author | Cristiano, Fuccio | |
| dc.contributor.author | Thuries, Louis | |
| dc.date.accessioned | 2025-06-05T14:11:02Z | |
| dc.date.available | 2025-03-06T20:46:08Z | |
| dc.date.available | 2025-06-05T14:11:02Z | |
| dc.date.issued | 2024 | |
| dc.identifier.isbn | 979-8-3503-8518-2 | |
| dc.identifier.issn | 2380-632X | |
| dc.identifier.other | WOS:001411360600020 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/45333.2 | |
| dc.source | WOS | |
| dc.title | Investigation of the enlargement of Ru grains and failure modes analysis in microsecond UV laser annealing | |
| dc.type | Proceedings paper | |
| dc.contributor.imecauthor | Tokei, Zsolt | |
| dc.contributor.orcidimec | Tokei, Zsolt::0000-0003-3545-3424 | |
| dc.identifier.doi | 10.1109/IITC61274.2024.10732322 | |
| dc.identifier.eisbn | 979-8-3503-8517-5 | |
| dc.source.numberofpages | 3 | |
| dc.source.peerreview | yes | |
| dc.source.conference | 2024 International Interconnect Technology Conference | |
| dc.source.conferencedate | JUN 03-06, 2024 | |
| dc.source.conferencelocation | San Jose | |
| dc.source.journal | N/A | |
| imec.availability | Published - imec | |
| dc.description.wosFundingText | This project has received funding from the ECSEL Joint Undertaking (JU) under grant agreement No 875999. The JU receives support from the European Union's Horizon 2020 research and innovation program and Netherlands, Belgium, Germany, France, Austria, Hungary, United Kingdom, Romania, Israel. The project has also received funding from the French PSPC project IT2-FR. The authors gratefully acknowledge T. Tabata and M.A. Khaled for supporting the work. | |
