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Innovative electro-structural integration approach defining large-area PMUT on TFT backplane for ultrasound imaging systems

dc.contributor.authorGijsenbergh, Pieter
dc.contributor.authorMalainou, Antonia
dc.contributor.authorWysocka, Dominika
dc.contributor.authorUkropec, Robert
dc.contributor.authorStoppato, Alessandro
dc.contributor.authorShen, Zhiyuan
dc.contributor.authorDe Roose, Florian
dc.contributor.authorAppeltans, Raf
dc.contributor.authorRochus, Veronique
dc.contributor.authorRottenberg, Xavier
dc.date.accessioned2025-05-08T13:15:41Z
dc.date.available2025-04-03T04:34:53Z
dc.date.available2025-05-08T13:15:41Z
dc.date.issued2024
dc.identifier.isbn979-8-3503-7191-8
dc.identifier.issn1099-4734
dc.identifier.otherWOS:001428150100419
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/45486.2
dc.sourceWOS
dc.titleInnovative electro-structural integration approach defining large-area PMUT on TFT backplane for ultrasound imaging systems
dc.typeProceedings paper
dc.contributor.imecauthorGijsenbergh, Pieter
dc.contributor.imecauthorMalainou, Antonia
dc.contributor.imecauthorWysocka, Dominika
dc.contributor.imecauthorUkropec, Robert
dc.contributor.imecauthorStoppato, Alessandro
dc.contributor.imecauthorShen, Zhiyuan
dc.contributor.imecauthorDe Roose, Florian
dc.contributor.imecauthorAppeltans, Raf
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.orcidimecGijsenbergh, Pieter::0000-0003-0135-6968
dc.contributor.orcidimecWysocka, Dominika::0000-0001-5056-6502
dc.contributor.orcidimecUkropec, Robert::0000-0003-4528-455X
dc.contributor.orcidimecShen, Zhiyuan::0000-0003-0875-6964
dc.contributor.orcidimecDe Roose, Florian::0000-0003-4490-5007
dc.contributor.orcidimecAppeltans, Raf::0000-0003-1617-8228
dc.contributor.orcidimecRochus, Veronique::0000-0001-9680-5724
dc.contributor.orcidimecRottenberg, Xavier::0000-0003-0920-1709
dc.identifier.doi10.1109/UFFC-JS60046.2024.10793958
dc.identifier.eisbn979-8-3503-7190-1
dc.source.numberofpages4
dc.source.peerreviewyes
dc.source.conference2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium
dc.source.conferencedateSEP 22-26, 2024
dc.source.conferencelocationTaipei
dc.source.journalN/A
imec.availabilityPublished - imec


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220.500.12860/45486.2*2025-05-08T13:14:41Zvalidation by library/open access desk
120.500.12860/454862025-04-03T04:34:53Z

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