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Effect of silicidation schemes on interface contact resistance
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Authors
Wang, Qingfeng
;
Lauwers, Anne
;
Deweerdt, Bruno
;
Maex, Karen
Conference
24th European Solid State Device Research Conference - ESSDERC
Title
Effect of silicidation schemes on interface contact resistance
Publication type
Proceedings paper
Embargo date
9999-12-31
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