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Silicides: materials science and applications for microelectronics

dc.contributor.authorMaex, Karen
dc.contributor.authorLauwers, Anne
dc.date.accessioned2021-10-14T13:18:53Z
dc.date.available2021-10-14T13:18:53Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4552
dc.sourceIIOimport
dc.titleSilicides: materials science and applications for microelectronics
dc.typeProceedings paper
dc.contributor.imecauthorMaex, Karen
dc.contributor.imecauthorLauwers, Anne
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage250
dc.source.endpage260
dc.source.conferenceSilicides: Fundamentals and Applications; Proceedings of the 16th Course of the International School of Solid State Physics
dc.source.conferencedate5/06/1999
dc.source.conferencelocationErice Italy
imec.availabilityPublished - open access


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