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Investigation of Reactive Ion Etching Processes on Mg-Based Oxide Semiconductors: MgZnO
Publication:
Investigation of Reactive Ion Etching Processes on Mg-Based Oxide Semiconductors: MgZnO
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Date
2025-APR 17
Journal article
https://doi.org/10.1021/acsaelm.5c00029
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ghorbani, Leila
;
Kundu, Shreya
;
Li, Jie
;
Kundu, Souvik
;
Mukherjee, Shankha
;
Kruv, Anastasiia
;
De Gendt, Stefan
Journal
ACS APPLIED ELECTRONIC MATERIALS
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129
since deposited on 2025-04-29
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Acq. date: 2026-01-10
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Views
129
since deposited on 2025-04-29
1
last month
Acq. date: 2026-01-10
Citations