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dc.contributor.authorMogilnikov, K. P.
dc.contributor.authorPolovinkin, V. G.
dc.contributor.authorDultsev, F. N.
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-14T13:24:19Z
dc.date.available2021-10-14T13:24:19Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4592
dc.sourceIIOimport
dc.titleCalculation of pore size distribution in the ellipsometric porosimetry: method and reliability
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.beginpage81
dc.source.endpage86
dc.source.conferenceLow-Dielectric Constant Materials V; 5-9 April 1999; San Francisco, Ca, USA.
dc.source.conferencelocation
imec.availabilityPublished - imec


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