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Microlens fabrication in PMMA with scanning excimer laser ablation techniques

dc.contributor.authorNaessens, Kris
dc.contributor.authorVan Daele, Peter
dc.contributor.authorBaets, Roel
dc.date.accessioned2021-10-14T13:25:41Z
dc.date.available2021-10-14T13:25:41Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4602
dc.sourceIIOimport
dc.titleMicrolens fabrication in PMMA with scanning excimer laser ablation techniques
dc.typeProceedings paper
dc.contributor.imecauthorVan Daele, Peter
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecVan Daele, Peter::0000-0003-0557-7741
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage99
dc.source.endpage102
dc.source.conferenceProceedings Symposium IEEE/LEOS Benelux Chapter
dc.source.conferencedate30/10/2000
dc.source.conferencelocationDelft The Netherlands
imec.availabilityPublished - open access


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