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Microgroove fabrication with excimer laser ablation techniques for optical fibre array alignment purposes

dc.contributor.authorNaessens, Kris
dc.contributor.authorVan Hove, An
dc.contributor.authorCoosemans, Thierry
dc.contributor.authorVerstuyft, Steven
dc.contributor.authorVanwassenhove, Luc
dc.contributor.authorVan Daele, Peter
dc.contributor.authorBaets, Roel
dc.date.accessioned2021-10-14T13:26:00Z
dc.date.available2021-10-14T13:26:00Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4604
dc.sourceIIOimport
dc.titleMicrogroove fabrication with excimer laser ablation techniques for optical fibre array alignment purposes
dc.typeOral presentation
dc.contributor.imecauthorVerstuyft, Steven
dc.contributor.imecauthorVan Daele, Peter
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecVan Daele, Peter::0000-0003-0557-7741
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.source.peerreviewno
dc.source.conference1st International Symposium on Laser Precision Microfabrication
dc.source.conferencedate14/06/2000
dc.source.conferencelocationSaitama Japan
imec.availabilityPublished - imec


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