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Metal and polySi (Ge) micromechanical devices for high frequency application

dc.contributor.authorPamidighantam, Sayanu
dc.contributor.authorJansen, Henri
dc.contributor.authorVerbist, Agnes
dc.contributor.authorTilmans, Harrie
dc.contributor.authorBaert, Kris
dc.contributor.authorPuers, Bob
dc.date.accessioned2021-10-14T13:32:15Z
dc.date.available2021-10-14T13:32:15Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4648
dc.sourceIIOimport
dc.titleMetal and polySi (Ge) micromechanical devices for high frequency application
dc.typeProceedings paper
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorPuers, Bob
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage673
dc.source.endpage676
dc.source.conferenceProceedings of SeSens
dc.source.conferencedate30/11/2000
dc.source.conferencelocationVeldhoven The Netherlands
imec.availabilityPublished - open access


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