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Study of Si deposition in a batch-type LPCVD-system for industrial thin-film crystalline Si solar cells

dc.contributor.authorPoortmans, Jef
dc.contributor.authorBeaucarne, Guy
dc.date.accessioned2021-10-14T13:34:56Z
dc.date.available2021-10-14T13:34:56Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4666
dc.sourceIIOimport
dc.titleStudy of Si deposition in a batch-type LPCVD-system for industrial thin-film crystalline Si solar cells
dc.typeProceedings paper
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage347
dc.source.endpage350
dc.source.conferenceConference Record of the 28th IEEE Photovoltaic Specialists Conference
dc.source.conferencedate15/09/2000
dc.source.conferencelocationAnchorage, AK USA
imec.availabilityPublished - open access


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