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Conference contributions
Impact of residual high-energy boron implantation induced p-well defects on shallow junctions
Publication:
Impact of residual high-energy boron implantation induced p-well defects on shallow junctions
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Date
2000
Proceedings Paper
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Poyai, Amporn
;
Simoen, Eddy
;
Claeys, Cor
;
Rooyackers, Rita
;
Badenes, Gonçal
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Abstract
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1800
since deposited on 2021-10-14
Acq. date: 2025-12-16
Citations
Metrics
Views
1800
since deposited on 2021-10-14
Acq. date: 2025-12-16
Citations