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Impact of residual high-energy boron implantation induced p-well defects on shallow junctions
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Authors
Poyai, Amporn
;
Simoen, Eddy
;
Claeys, Cor
;
Rooyackers, Rita
;
Badenes, Gonçal
Conference
Proceedings Semiconductor Advances for Future Electronics - SAFE
Title
Impact of residual high-energy boron implantation induced p-well defects on shallow junctions
Publication type
Proceedings paper
Embargo date
9999-12-31
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